Nanofabrication Laboratory
The Nano Lab combines a number of complementary techniques that enable both 2D and 3D nanofabrication.
Nano Lab, Swinburne's multi-use nanotechnology laboratory which facilitates research, prototyping and education in nanotechnology. Housed in a cleanroom in the Advanced Technologies Centre at the Hawthorn campus, the laboratory has a suite of tools capable of three-dimensional (3D) and traditional two-dimensional (2D) structuring, device fabrication and materials processing.
Our users are trained by lab engineers to explore nano- micro-fabrication for a wide range of phenomena and applications to control light propagation, absorption, scattering and biocidal surfaces. Specific areas of research include solar cells, light harvesting and fabrication of surfaces for photo-catalytic application and mechano-biocidal nanotextures.
Our $8 million facility houses state-of-the-art tools capable of the highest resolution nanofabrication—down to 10 nanometers (10.000 times smaller than a cross-section of human hair).
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Nanolab Microscope -
Nanolab Laser Optics -
Nanolab Screen
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“The clean room is a micro-particle-free environment that allows us to fabricate and modify materials with a versatile suite of nanofabrication tools providing 3D nanoscale control with industrial applications in focus.”
Professor Saulius Juodkazis
Laboratory tools
electron beam lithography (EBL) – Raith 150two with 10 nm resolution
ion beam lithography IBL – Raith IonLiNE (Ga+) with 10 nm resolution
sputter-coater – JKLesker AXXIS e-beam evaporation and plasma sputtering (metals; dielectrics)
dry-etcher – inductively coupled plasma etching Samco RIE-101iPH
industrial high power ultra-short pulse laser – Pharos producing 1030, 515, 257 nm wavelength 230 fs laser pulses up to 600 kHz repetition rate with average power of 10W (1030nm) till 1W (257 nm)
mask aligner – AOI (1-2 micron resolution)
nanoimprint
chemistry room, critical point dryer.
The laboratory's research has had high impact outcomes led to publications, patent applications, technology transfers (both nationally and internationally).
Outcomes
mass production solution of surface enhanced Raman scattering (SERS) sensors (patent and licence to Altechna Ltd., Lithuania)
development of black silicon – nano-spikey surfaces of silicon – which has a bactericidal effect (patent, licence to Global Orthopedic LtD, IMCRC)
pathway for new high-pressure/temperature phases of nanomaterials using ultra-short focused laser pulses
Black-CuO as a SERS sensor (technology transfer to Flewsolutions Pty).
Want to access this facility?
It’s available for Swinburne students and staff as well as researchers from other universities to use. Just use our handy online booking system.
Fee schedule
Access to this facility is granted on a fee-for-service, collaboration-for-service or a combination of both. You cannot commence using the facility until a signed access agreement has been completed and specific SUTNFS project number has been provided.
Note: Pricing is indicative only; final costs will depend on the nature and duration of your project.
| Equipment usage or service provided | Hourly rate of total usage per project in calendar year (A$ excl. GST) | |||
|---|---|---|---|---|
| Nano Lab Facility | 1-50 hours | 51-100 hours | 101-200 hours | 201+ hours |
| Raith EBL | $125 | $100 | $75 | $50 |
| Raith SEM | $125 | $100 | $75 | $50 |
| Raith IBL | $125 | $100 | $75 | $50 |
| KJL PVD e-Beam evap | $125 | $100 | $75 | $50 |
| Samco ICP-RIE | $125 | $100 | $75 | $50 |
| Mask Aligner | $125 | $100 | $75 | $50 |
| NanoImprint | $125 | $100 | $75 | $50 |
| Pharos Laser Fabrication | $125 | $100 | $75 | $50 |
| Staff Technical Assistance General | $125 | $100 | $75 | $50 |
| Staff Technical Assistance Training | $125 | $100 | $75 | $50 |
| Equipment usage or service provided | Hourly rate of total usage per project in calendar year (A$ excl. GST) | |||
|---|---|---|---|---|
| Nano Lab Facility | 1-50 hours | 51-100 hours | 101-200 hours | 201+ hours |
| Raith EBL | $100 | $80 | $60 | $40 |
| Raith SEM | $100 | $80 | $60 | $40 |
| Raith IBL | $100 | $80 | $60 | $40 |
| KJL PVD e-Beam evap | $100 | $80 | $60 | $40 |
| Samco ICP-RIE | $100 | $80 | $60 | $40 |
| Mask Aligner | $100 | $80 | $60 | $40 |
| NanoImprint | $100 | $80 | $60 | $40 |
| Pharos Laser Fabrication | $100 | $80 | $60 | $40 |
| Staff Technical Assistance General | $100 | $80 | $60 | $40 |
| Staff Technical Assistance Training | $100 | $80 | $60 | $40 |
| Equipment usage or service provided | Hourly rate of total usage per project in calendar year (A$ excl. GST) | |||
|---|---|---|---|---|
| Nano Lab Facility | 1-50 hours | 51-100 hours | 101-200 hours | 201+ hours |
| Raith EBL | $50 | $40 | $30 | $20 |
| Raith SEM | $50 | $40 | $30 | $20 |
| Raith IBL | $50 | $40 | $30 | $20 |
| KJL PVD e-Beam evap | $50 | $40 | $30 | $20 |
| Samco ICP-RIE | $50 | $40 | $30 | $20 |
| Mask Aligner | $50 | $40 | $30 | $20 |
| NanoImprint | $50 | $40 | $30 | $20 |
| Pharos Laser Fabrication | $50 | $40 | $30 | $20 |
| Staff Technical Assistance General | $50 | $40 | $30 | $20 |
| Staff Technical Assistance Training | $50 | $40 | $30 | $20 |
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Optical Sciences Centre
The Optical Sciences Centre conducts research addressing scientific and technological challenges in the domain of optical sciences spanning classical and quantum photonics, light–matter interactions, nanotechnology, biomedical and biosciences, quantum gases and quantum materials.
Funding
Nano Lab is partially funded by the state government through a Victorian Science Agenda grant, Australian National Fabrication Facility (ANFF).
Faculty and Research Office
The laboratory installed the nano-lithography equipment through a partnership between Swinburne and German company Raith. The industrial high power ultra-short pulse laser was acquired through a provisional patent licence to Lithuanian company Altechna Ltd.
Other international collaborations extend to Japan (Shizuoka University, Yokohama National University and Tokyo Institute of Technology), France (Bordeaux University) and the United States (University of Virginia), India (Indian Institute of Technology IIT-Madras), China (Jilin, Shandong Universities).
Explore our news
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- Science
Shining a light on Alzheimer’s disease
Swinburne researchers are mimicking the texture of insect wings to detect early signs of Alzheimer’s.Thursday 08 September 2016 -
- Science
Saulius Juodkazis recognised for research
Professor Juodkazis has been awarded a Chang Jiang Scholar by the Ministry of Education in China.Monday 29 February 2016
Contact the Nano Lab team
Whether you’re a PhD student, media, or an organisation looking to partner with us or access our facility or partner with us, please contact Professor Saulius Juodkazis via sjuodkazis@swinburne.edu.au.